National Tsing Hua University Institutional Repository:渦輪分子幫浦被動式磁浮軸承系統之分析與性能提升

Title: 渦輪分子幫浦 被動式磁浮軸承系統之分析與性能提升 Other Titles: Analysis and Improvement of a Turbo Molecular ...

nthur.lib.nthu.edu.tw