Chapter 7 Plasma Basics

4 2006/4/12 7 Neutral Gas Density •Idea gas –1 mole = 22.4 Litter = 2.24 104 cm3 –1 mole = 6.62 1023 molecules •At 1 atm, gas density is 2.96 1019 cm3 •At 1 Torr, gas density is 3.89 1016 cm3 •At 1 mTorr, gas density is 3.89 1013 cm3 •RF plasma has very .

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