弗侖斯系統股份有限公司

6吋自動光阻顯影生產線 機台:DNS DA-60A 製程: 光阻顯影 ‧ Substrate size: 6" ‧ Coating of Positive resists : 10 μm to 25 μm. ‧ Coating of positive resists, including soft bake. ‧ Uniformity: ± 5% within wafer ‧ Capacity: 10k pieces/month

www.afsc.com.tw